New approaches to production-worthy 193-nm photoresists based on acrylic copolymers

Thomas I. Wallow; Robert D. Allen; Juliann Opitz; Richard A. Di Pietro; Phillip J. Brock; Ratnam Sooriyakumaran; Donald C. Hofer

doi:10.1117/12.312470

29 June 1998 New approaches to production-worthy 193-nm photoresists based on acrylic copolymers

Thomas I. Wallow, Robert D. Allen, Juliann Opitz, Richard A. Di Pietro, Phillip J. Brock, Ratnam Sooriyakumaran, Donald C. Hofer

Author Affiliations +

Proceedings Volume 3333, Advances in Resist Technology and Processing XV; (1998) https://doi.org/10.1117/12.312470
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

We describe a series of improvements to the `v2' etch- resistant methacrylate 193 nm photoresist platform. `V2' itself possesses many desirable characteristics, but requires weak developers and lacks ultimate etch resistance for production processes. Modifications to address these challenges include incorporation of polar modifier monomers which provide improved developer compatibility, and use of alternative etch-resistant monomers which ameliorate the excessive hydrophobicity of isobornyl methacrylate. Specifically, we explore the use of methacrylonitrile as a polar modifier which simultaneously imparts strong-developer compatibility and improves RIE performance. Integration of these improvements results in methacrylate resists displaying strong-developer compatibility, sub-0.15 micrometers resolution, and etch rates equivalent to current 248 nm photoresists in prototype materials.

Citation Download Citation

Thomas I. Wallow, Robert D. Allen, Juliann Opitz, Richard A. Di Pietro, Phillip J. Brock, Ratnam Sooriyakumaran, and Donald C. Hofer "New approaches to production-worthy 193-nm photoresists based on acrylic copolymers", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); https://doi.org/10.1117/12.312470

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