PROCEEDINGS VOLUME 1596
MICROELECTRONIC PROCESSING INTEGRATION | 1-30 SEPTEMBER 1991
Metallization: Performance and Reliability Issues for VLSI and ULSI
Editor(s): Gennady Sh. Gildenblat, Gary P. Schwartz
Editor Affiliations +
IN THIS VOLUME

3 Sessions, 14 Papers, 0 Presentations, 0 Posters
MICROELECTRONIC PROCESSING INTEGRATION
1-30 September 1991
San Jose, CA, United States
Processing Issues
David K. Ferry, Michael N. Kozicki, Gregory B. Raupp
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51006
Manjin J. Kim
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51007
Ajay Jain, H. K. Shin, Kai-Ming Chi, Mark J. Hampden-Smith, Toivo T. Kodas, Janos Farkas, M. T. Paffett, J. D. Farr
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51008
Li-Hsin Chang, Ray Goodner
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51009
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51010
Reliability and Failure Modes
H. Barry Harrison, Geoffrey K. Reeves
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51011
Thomas Kwok
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51012
Darrel R. Frear, Joseph R. Michael, C. Kim, A. D. Romig Jr., J. W. Morris Jr.
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51013
Timothy D. Sullivan, James G. Ryan, J. R. Riendeau, Dennis P. Bouldin
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51014
Nadia Lifshitz, Mark R. Pinto
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51015
James R. Lloyd
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51016
Characterization
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51017
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51018
Humayun R. Siddiqui, Vivian Ryan, Julie A. Shimer
Proceedings Volume Metallization: Performance and Reliability Issues for VLSI and ULSI, (1991) https://doi.org/10.1117/12.51019
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