Self-aligned resonant tunneling-diode finger structure for high cut-off frequency and device integration

Xiao J. Song; Jinbo Kuang; William J. Schaff; Paul J. Tasker; Kimiyoshi Yamasaki; Lester Fuess Eastman

doi:10.1117/12.20914

1 August 1990 Self-aligned resonant tunneling-diode finger structure for high cut-off frequency and device integration

Xiao J. Song, Jinbo Kuang, William J. Schaff, Paul J. Tasker, Kimiyoshi Yamasaki, Lester Fuess Eastman

Proceedings Volume 1288, High-Speed Electronics and Device Scaling; (1990) https://doi.org/10.1117/12.20914
Event: Advances in Semiconductors and Superconductors: Physics Toward Devices Applications, 1990, San Diego, CA, United States

Abstract

Planar, interdigitated In0.53Ga0.47As/GaAs finger structure resonant tunneling diodes (RTDs) have been successfully fabricated on the semi-insulating InP substrate by using a novel self-alignment and air-bridge technique. This design significantly reduces the parasitic series resistance, increases the oscillation frequency, and reduces the power loss. The front-side contact scheme also enables the monolithic integration of the RTDs in series to achieve multiple negative differential resistances.

Citation Download Citation

Xiao J. Song, Jinbo Kuang, William J. Schaff, Paul J. Tasker, Kimiyoshi Yamasaki, and Lester Fuess Eastman "Self-aligned resonant tunneling-diode finger structure for high cut-off frequency and device integration", Proc. SPIE 1288, High-Speed Electronics and Device Scaling, (1 August 1990); https://doi.org/10.1117/12.20914

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