Flatness Measurements Of Mounted Stage Mirrors

Earl Ebert

doi:10.1117/12.953114

19 July 1989 Flatness Measurements Of Mounted Stage Mirrors

Earl Ebert

Proceedings Volume 1087, Integrated Circuit Metrology, Inspection, and Process Control III; (1989) https://doi.org/10.1117/12.953114
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

A method for measuring the flatness of mounted stage mirrors is presented. This is the first part of an effort to map stage mirrors mounted on an X-Y stage for the purpose of subtracting mirror flatness errors from distance measurements. The absolute surface flatness of an optical straight edge is determined using an interferometric three flat test. This calibrated mirror is measured against the stage mirror using a displacement measuring interferometer (DMI) system. A sample stage mirror is measured using a three flat test. The measured flatness is compared against that obtained using the DMI system. Results to date are presented. The accuracy of the system is currently limited by the accuracy of the three flat test, environmental factors, and second order rotation sensitivity of the interferometer.

Citation Download Citation

Earl Ebert "Flatness Measurements Of Mounted Stage Mirrors", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); https://doi.org/10.1117/12.953114

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