A simulation study on bridge defects in lamellae-forming diblock copolymers

Hironobu Sato; Katsuyoshi Kodera; Yuriko Seino; Yusuke Kasahara; Ken Miyagi; Masayuki Shiraishi; Tsukasa Azuma

doi:10.1117/12.2297287

13 March 2018 A simulation study on bridge defects in lamellae-forming diblock copolymers

Hironobu Sato, Katsuyoshi Kodera, Yuriko Seino, Yusuke Kasahara, Ken Miyagi, Masayuki Shiraishi, Tsukasa Azuma

Proceedings Volume 10586, Advances in Patterning Materials and Processes XXXV; 105860U (2018) https://doi.org/10.1117/12.2297287
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

In this paper we will describe a self-consistent field theory simulation study on bridge defects in lamellae-forming diblock copolymers. Because the bridge defects are buried three-dimensional defects formed in the diblock copolymer film, it is difficult to observe and determine what causes them. To determine the cause of the bridge defects effectively, self-consistent field theory simulations were used. By reproducing structural characteristics of the bridge defects in the simulation, the cause of the bridge defects were clarified. Finally, we discussed ways to prevent the bridge defects.

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Citation Download Citation

Hironobu Sato, Katsuyoshi Kodera, Yuriko Seino, Yusuke Kasahara, Ken Miyagi, Masayuki Shiraishi, and Tsukasa Azuma "A simulation study on bridge defects in lamellae-forming diblock copolymers", Proc. SPIE 10586, Advances in Patterning Materials and Processes XXXV, 105860U (13 March 2018); https://doi.org/10.1117/12.2297287

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