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Qi Yu
at Chinese Academy of Science
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Publications (1)
Proceedings Article | 8 March 2017 Paper
Effect of oxygen flux on stress and optical properties of Ta-2 O-5 using ion-beam sputtering
Qi Yu, Jun-qi Fan, Chun-lin Guan
Proceedings Volume 10255, 102551E (2017) https://doi.org/10.1117/12.2267493
KEYWORDS: Oxygen, Optical properties, Ion beams, Sputter deposition, Thin films, Tantalum, Refractive index, Ions, Optical coatings, Thin film coatings
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