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Gaddiel Y. Ouaknin
at Stanford Univ
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Publications (1)
Proceedings Article | 22 March 2016 Paper
Shape optimization for DSA
Gaddiel Ouaknin, Nabil Laachi, Kris Delaney, Glenn Fredrickson, Frederic Gibou
Proceedings Volume 9777, 97770Y (2016) https://doi.org/10.1117/12.2218515
KEYWORDS: Inverse problems, Optimization (mathematics), Detection and tracking algorithms, Directed self assembly, Photomasks, Lithography, Integrated circuits, Polymers, Algorithms, Target detection, Algorithm development, Interfaces
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