Mr. Yuki Soh Profile

Yuki Soh

PhD Student at Kumamoto Univ

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Publications (3)

Proceedings Article | 7 December 2013 Paper

Development of a multi-flash lamp in pulse photo conductivity method

J. Fukashi, J. Ndagijimana, Y. Soh, K. Kobayashi, M. Furuta, Hiroshi Kubota

Proceedings Volume 8923, 892353 (2013) https://doi.org/10.1117/12.2033813

KEYWORDS: Lamps, Light sources, Xenon, Semiconductors, Semiconducting wafers, Optical fibers, Dielectrics, Electrodes, Nondestructive evaluation, Light

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Proceedings Article | 7 December 2013 Paper

Development of a multi-electrode system for non-destructive and contactless wafer evaluation

Justin Ndagijmana, Yuki Soh, Junpei Fukashi, K. Kobayashi, Masaaki Furuta, Hiroshi Kubota

Proceedings Volume 8923, 892352 (2013) https://doi.org/10.1117/12.2033812

KEYWORDS: Semiconducting wafers, Oxides, Semiconductors, Nondestructive evaluation, Dielectrics, Silicon, Reliability, Dielectric breakdown, Silica, Transistors

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Proceedings Article | 24 December 2011 Paper

Sub-nm-scale precision stage using nonresonant-ultrasonic motor for making of nanodevices

Y. Soh, K. Kosaka, H. Kubota

Proceedings Volume 8204, 82043S (2011) https://doi.org/10.1117/12.903249

KEYWORDS: Actuators, Ultrasonics, Neodymium, Semiconductor manufacturing, Particles, Inspection, Scanning electron microscopy, Reticles, Optical lithography, Photomasks

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