Dr. Yuhan Yao
Ph.D. Student at Univ of Southern California
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 April 2017 Presentation
Yuhan Yao, Yifei Wang, Yuanrui Li, He Liu, Boxiang Song, Wei Wu
Proceedings Volume 10113, 1011313 (2017) https://doi.org/10.1117/12.2253494
KEYWORDS: Finite-difference time-domain method, Amorphous silicon, Silicon, Silica, Tolerancing, Dielectrics, Reflectivity, Reactive ion etching, Infrared radiation, Visible radiation

Proceedings Article | 21 September 2015 Paper
Proceedings Volume 9604, 960408 (2015) https://doi.org/10.1117/12.2186812
KEYWORDS: Aluminum, Optical filters, Extreme ultraviolet, Contamination, Ultraviolet radiation, Scanning electron microscopy, Carbon, Thin films, Nitrogen, Oxidation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top