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Yue Tang
at Beijing Institute of Technology
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Publications (1)
Proceedings Article | 5 March 2021 Paper
A 2D electrothermal micromirror with feedback based on Hall-effect of piezoresistive sensors
Proceedings Volume 11697, 1169718 (2021) https://doi.org/10.1117/12.2582654
KEYWORDS: Piezoresistive sensors, Micromirrors, Mirrors, Actuators, Microelectromechanical systems, Finite element methods, Silicon, Silica, Medical research, Image processing
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