Silica-based sol-gel antireflective (AR) optical coatings are critical components for high peak power laser systems. It is
well known that water vapor and volatile organic compounds in both the laser bay and target bay environments will
reduce the antireflective efficiency and laser-damage resistance of the sol-gel AR coating. In this study, alkylation with
organosilanes in the vapor state was investigated. Sol-gel AR coatings were vapor-phase treated with
hexamethyldisilazane (HMDS) and trimethylchlorosilane (TMCS) at room temperature, and the resulting post-treated
sol-gel AR coatings were tested for their resistance to contamination by a series of volatile organic compounds. Contact
angle measurements were taken to discern the degree of silanization. After the vapor treatment of sol-gel AR coatings
with organosilanes, the spectral performance of the coatings were analyzed by spectrophotometer, both before and after
the exposure to volatile organic compounds. It is found that the coatings treated with ammonia and HMDS show a better
contamination resistant capability. After being contaminated 70 hours with hexane, the transmittance of the coatings
presents no obvious decrease. And the vapor treatment produces an increase in their damage threshold at 1064 nm (10ns
pulse width) as compared to untreated control samples.
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