In order to improve the accuracy of an instrument by reducing or correcting the error of a sensor system, a calibration
device which can be used to trace the laser wavelength is used to calibrate the static and dynamic characteristics of dual
sensor system. Based on the accurate calibration data of the sensor, the nonlinearity error and the coherence error are
corrected and compensated using least-square approximation model and interpolation method. Test results indicate that
the nonlinearity of each sensor can be within 0.15% in the range of ±10μm and the incoherence is less than 0.2 % in the
range of ±5μm after corrected. Meanwhile, the cause and effect of a misalignment error between dual sensors are
analyzed.
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