Dr. Yong Wang
Manager at JSR Engineering Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 11 April 2006 Paper
Yuji Yada, Koji Ito, Yoshikazu Yamaguchi, Taiichi Furukawa, Takashi Miyamatsu, Yong Wang, Katsuhiko Hieda, Tsutomu Shimokawa
Proceedings Volume 6153, 61531W (2006) https://doi.org/10.1117/12.655983
KEYWORDS: Photoresist materials, Lithography, Refractive index, Semiconducting wafers, Immersion lithography, Microfluidics, Absorbance, Transmittance, 193nm lithography, Water

Proceedings Article | 11 April 2006 Paper
Yong Wang, Takashi Miyamatsu, Taiichi Furukawa, Kinji Yamada, Tetsuo Tominaga, Yutaka Makita, Hiroki Nakagawa, Atsushi Nakamura, Motoyuki Shima, Shiro Kusumoto, Tsutomu Shimokawa, Katsuhiko Hieda
Proceedings Volume 6153, 61530A (2006) https://doi.org/10.1117/12.656022
KEYWORDS: Refractive index, Water, Immersion lithography, Ultraviolet radiation, Absorbance, Laser irradiation, Absorption, Photoresist materials, Transmittance, Prisms

Proceedings Article | 4 May 2005 Paper
Takashi Miyamatsu, Yong Wang, Motoyuki Shima, Shiro Kusumoto, Takashi Chiba, Hiroki Nakagawa, Katsuhiko Hieda, Tsutomu Shimokawa
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599165
KEYWORDS: Refractive index, Photoresist materials, Water, Immersion lithography, Ultraviolet radiation, Lithography, Transmittance, Semiconducting wafers, Interferometry, Transparency

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