Mr. Yohei Fujishima Profile

Yohei Fujishima

at Nikon Corp

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Author

Publications (3)

Proceedings Article | 31 March 2014 Paper

Imaging control functions of optical scanners

Hisashi Nishinaga, Toru Hirayama, Daiyu Fujii, Hajime Yamamoto, Hiroshi Irihama, Taro Ogata, Yukio Koizumi, Kenta Suzuki, Yohei Fujishima, Tomoyuki Matsuyama, Ryoichi Kawaguchi

Proceedings Volume 9052, 90520B (2014) https://doi.org/10.1117/12.2046640

KEYWORDS: Reticles, Distortion, Control systems, Ions, Sensors, Image sensors, Optical scanning, Printing, Immersion lithography, Lithography

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Proceedings Article | 12 April 2013 Paper

Comprehensive thermal aberration and distortion control of lithographic lenses for accurate overlay

Yohei Fujishima, Satoshi Ishiyama, Susumu Isago, Akihiro Fukui, Hajime Yamamoto, Toru Hirayama, Tomoyuki Matsuyama, Yasuhiro Ohmura

Proceedings Volume 8683, 86831I (2013) https://doi.org/10.1117/12.2010908

KEYWORDS: Distortion, Reticles, Lithography, Switching, Water, Semiconducting wafers, Imaging systems, Deformable mirrors, Lithographic lenses, Immersion lithography

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Proceedings Article | 26 March 2007 Paper

Catadioptric projection lens for 1.3 NA scanner

Tomoyuki Matsuyama, Yasuhiro Ohmura, Yohei Fujishima, Takashi Koyama

Proceedings Volume 6520, 652021 (2007) https://doi.org/10.1117/12.711340

KEYWORDS: Combined lens-mirror systems, Mirrors, Chromatic aberrations, Lens design, Wavefronts, Optical design, Refractive index, Surface roughness, Scanners, Deep ultraviolet

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