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Dr. Yinzhen Wang
at Shanghai Institute of Optics and Fine Mechanics
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Author
Publications (1)
Proceedings Article | 20 January 2005 Paper
Surface treatment effects of sapphire for high-quality III-nitride film growth
Yinzhen Wang, Lingling Zhang, Shengming Zhou, Jun Xu
Proceedings Volume 5628, (2005) https://doi.org/10.1117/12.571058
KEYWORDS: Sapphire, Surface finishing, Chemical mechanical planarization, Polishing, Wet etching, Atomic force microscopy, Raman scattering, Crystals, Gallium nitride, Raman spectroscopy
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