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Yifei Yu
at KLA China
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 12 November 2024 Presentation + Paper
Adoption of darkfield blank inspector to enhance yield of optical reticles
Proceedings Volume 13216, 132160N (2024) https://doi.org/10.1117/12.3032712
KEYWORDS: Dark field illumination, Inspection, Reticles, Manufacturing, Contamination, Optics manufacturing, Diffraction, Quality control, Particles, Defect inspection
Proceedings Article | 21 November 2023 Presentation + Paper
Innovative applications: extending photomask registration tool for critical dimension measurement to achieve high efficiency
Yifei Yu, Leo Zeng, Kevin Wang, Xavier Chen, Christian Holl, Claire Lu, Phil Cha, Vic Chang, Robert Tsai, Jerry Wei, Lynne Yuan
Proceedings Volume 12751, 127510S (2023) https://doi.org/10.1117/12.2687005
KEYWORDS: Critical dimension metrology, Calibration, Photomasks, Data modeling, Opacity, Image registration, Cadmium, Design and modelling, Metrology, Optical microscopes
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