Dr. Ye Tian Profile

Dr. Ye Tian

Applications Engineering @ASML

Area of Expertise:

photolithography , EUV , fiber optics , sensors , overlay , metrology

Websites:

Personal Website | Company Website

Publications (20)

Proceedings Article | 28 March 2017 Paper

Enhanced methodology of focus control and monitoring on scanner tool

Yen-Jen Chen, Young Ki Kim, Xueli Hao, Juan-Manuel Gomez, Ye Tian, Ferhad Kamalizadeh, Justin Hanson

Proceedings Volume 10145, 101452K (2017) https://doi.org/10.1117/12.2258125

KEYWORDS: Scanners, Diffraction, Metrology, Semiconducting wafers, Process control, Calibration, Reticles, Overlay metrology, Critical dimension metrology, Lithography

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As the demand of the technology node shrinks from 14nm to 7nm, the reliability of tool monitoring techniques in advanced semiconductor fabs to achieve high yield and quality becomes more critical. Tool health monitoring methods involve periodic sampling of moderately processed test wafers to detect for particles, defects, and tool stability in order to ensure proper tool health. For lithography TWINSCAN scanner tools, the requirements for overlay stability and focus control are very strict. Current scanner tool health monitoring methods include running BaseLiner to ensure proper tool stability on a periodic basis. The focus measurement on YIELDSTAR by real-time or library-based reconstruction of critical dimensions (CD) and side wall angle (SWA) has been demonstrated as an accurate metrology input to the control loop. The high accuracy and repeatability of the YIELDSTAR focus measurement provides a common reference of scanner setup and user process. In order to further improve the metrology and matching performance, Diffraction Based Focus (DBF) metrology enabling accurate, fast, and non-destructive focus acquisition, has been successfully utilized for focus monitoring/control of TWINSCAN NXT immersion scanners. The optimal DBF target was determined to have minimized dose crosstalk, dynamic precision, set-get residual, and lens aberration sensitivity. By exploiting this new measurement target design, ~80% improvement in tool-to-tool matching, >16% improvement in run-to-run mean focus stability, and >32% improvement in focus uniformity have been demonstrated compared to the previous BaseLiner methodology. Matching <2.4 nm across multiple NXT immersion scanners has been achieved with the new methodology of set baseline reference. This baseline technique, with either conventional BaseLiner low numerical aperture (NA=1.20) mode or advanced illumination high NA mode (NA=1.35), has also been evaluated to have consistent performance. This enhanced methodology of focus control and monitoring on multiple illumination conditions, opens an avenue to significantly reduce Focus-Exposure Matrix (FEM) wafer exposure for new product/layer best focus (BF) setup.

Proceedings Article | 24 March 2016 Paper

Focus control enhancement and on-product focus response analysis methodology

Young Ki Kim, Yen-Jen Chen, Xueli Hao, Pavan Samudrala, Juan-Manuel Gomez, Mark Mahoney, Ferhad Kamalizadeh, Justin Hanson, Shawn Lee, Ye Tian

Proceedings Volume 9778, 97780T (2016) https://doi.org/10.1117/12.2213019

KEYWORDS: Error analysis, High volume manufacturing, Semiconducting wafers, Metrology, Process control, Control systems, Scanners, Diffraction, Time metrology, Forward error correction, Lithography, Critical dimension metrology

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Proceedings Article | 15 March 2016 Paper

CDU budget breakdown as a diagnostic method for imaging sensitivity in HVM

Young Ki Kim, Pavan Samudrala, Juan-Manuel Gomez, Peter Nikolsky, Roy Anunciado, Maria Barkelid, Shawn Lee, Ye Tian, Justin Hanson

Proceedings Volume 9780, 97801Q (2016) https://doi.org/10.1117/12.2214123

KEYWORDS: Semiconducting wafers, Reticles, Critical dimension metrology, Scanners, Photomasks, Metrology, Laser processing, Laser scanners, 3D scanning, Laser metrology

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SPIE Journal Paper | 20 June 2013 Open Access

Fiber-optic ultrasound generator using periodic gold nanopores fabricated by a focused ion beam

Ye Tian, Nan Wu, Xiaotian Zou, Haitham Felemban, Chengyu Cao, Xingwei Wang

OE, Vol. 52, Issue 06, 065005, (June 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.6.065005

KEYWORDS: Gold, Ultrasonography, Fiber optics, Photoacoustic spectroscopy, Nanolithography, Absorption, Nanostructures, Ion beams, Signal generators, Optical fibers

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Proceedings Article | 16 April 2013 Paper

Fiber optic photoacoustic ultrasound generator based on gold nanocomposite

Nan Wu, Ye Tian, Xiaotian Zou, Xingwei Wang

Proceedings Volume 8694, 86940Q (2013) https://doi.org/10.1117/12.2012241

KEYWORDS: Gold, Ultrasonography, Nanocomposites, Fiber optics, Absorption, Photoacoustic spectroscopy, Signal generators, Optical fibers, Pulsed laser operation, Nanoparticles

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Proceedings Article | 16 April 2013 Paper

Fiber optic ultrasound generator using periodic gold nanopattern fabricated by focused ion beam

Ye Tian, Nan Wu, Xiaotian Zou, Xingwei Wang

Proceedings Volume 8694, 86942E (2013) https://doi.org/10.1117/12.2012163

KEYWORDS: Ultrasonography, Gold, Nanostructures, Photoacoustic spectroscopy, Fiber optics, Optical fibers, Nanolithography, Absorption, Signal generators, Ion beams

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Proceedings Article | 16 April 2013 Paper

Nondestructive characterization for PDMS thin films using a miniature fiber optic photoacoustic probe

Xiaotian Zou, Nan Wu, Ye Tian, Xingwei Wang

Proceedings Volume 8694, 86940P (2013) https://doi.org/10.1117/12.2012073

KEYWORDS: Thin films, Acoustics, Fiber optics, Fiber optics sensors, Sensors, Gold, Nanocomposites, Nondestructive evaluation, Photoacoustic spectroscopy, Ultrasonography

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Proceedings Article | 6 April 2012 Paper

Study of the compact fiber optic photoacoustic ultrasonic transducer

Nan Wu, Ye Tian, Xiaotian Zou, Xingwei Wang

Proceedings Volume 8345, 83453Z (2012) https://doi.org/10.1117/12.915243

KEYWORDS: Ultrasonography, Transducers, Gold, Photoacoustic spectroscopy, Acoustics, Optical fibers, Absorption, Ultrasonics, Receivers, Nanoparticles

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Proceedings Article | 6 April 2012 Paper

Miniature fiber optic temperature sensor for concrete structural health monitoring

Xiaotian Zou, Alice Chao, Nan Wu, Ye Tian, Tzu-Yang Yu, Xingwei Wang

Proceedings Volume 8345, 83454V (2012) https://doi.org/10.1117/12.915265

KEYWORDS: Fiber optics sensors, Temperature sensors, Fiber optics, Sensors, Borosilicate glass, Cements, Structural health monitoring, Temperature metrology, Calibration, Civil engineering

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Proceedings Article | 3 June 2011 Paper

Study of blast event propagation in different media using a novel ultrafast miniature optical pressure sensor

Xiaotian Zou, Nan Wu, Ye Tian, Hongtao Zhang, Christopher Niezrecki, Xingwei Wang

Proceedings Volume 8028, 802809 (2011) https://doi.org/10.1117/12.887225

KEYWORDS: Sensors, Wave propagation, Traumatic brain injury, Optical fibers, Silica, Acoustics, Ultrafast phenomena, Fiber optics sensors, Sensor performance, Multimode fibers

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Proceedings Article | 26 May 2011 Paper

An optical biosensor using MEMS-based V-grooves

Ye Tian, Xiaodong Ma, Xiaotian Zou, Nan Wu, Xingwei Wang

Proceedings Volume 8024, 802403 (2011) https://doi.org/10.1117/12.880585

KEYWORDS: Silicon, Sensors, Biosensors, Gold, Microelectromechanical systems, Optical fibers, Molecules, Target detection, Fabrication, Self-assembled monolayers

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Proceedings Article | 17 May 2011 Paper

Ultra fast all-optical fiber pressure sensor for blast event evaluation

Nan Wu, Wenhui Wang, Ye Tian, Christopher Niezrecki, Xingwei Wang

Proceedings Volume 7753, 77535J (2011) https://doi.org/10.1117/12.885104

KEYWORDS: Sensors, Fiber optics sensors, Optical fibers, Traumatic brain injury, Silica, Multimode fibers, Ultrafast phenomena, Fabry–Perot interferometers, Silicon, Data processing

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Proceedings Article | 16 May 2011 Paper

A miniature pressure sensor for blast event evaluation

Nan Wu, Wenhui Wang, Ye Tian, Christopher Niezrecki, Xingwei Wang

Proceedings Volume 8029, 80290V (2011) https://doi.org/10.1117/12.884278

KEYWORDS: Sensors, Fiber optics sensors, Silicon, Fiber optics, Traumatic brain injury, Polishing, Microelectromechanical systems, Wave propagation, Fabry–Perot interferometers, Interfaces

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Proceedings Article | 15 April 2011 Paper

Simulation on photoacoustic conversion efficiency of optical fiber-based ultrasound generator using different absorbing film materials

Kai Sun, Nan Wu, Ye Tian, Xingwei Wang

Proceedings Volume 7982, 798213 (2011) https://doi.org/10.1117/12.880505

KEYWORDS: Gold, Ultrasonography, Photoacoustic spectroscopy, Nanoparticles, Absorption, Acoustics, Aluminum, Optical fibers, Finite element methods, Nanorods

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Proceedings Article | 14 April 2011 Paper

Finite element modeling of an optical fiber photoacoustic generator performance

Kai Sun, Nan Wu, Ye Tian, Xingwei Wang

Proceedings Volume 7981, 79811W (2011) https://doi.org/10.1117/12.880495

KEYWORDS: Ultrasonography, Photoacoustic spectroscopy, Finite element methods, Optical fibers, Pulsed laser operation, Thin films, Acoustics, Transducers, Absorption, Solids

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Proceedings Article | 1 April 2011 Paper

Adaptive sensor array algorithm for structural health monitoring of helmet

Xiaotian Zou, Ye Tian, Nan Wu, Kai Sun, Xingwei Wang

Proceedings Volume 7984, 79841A (2011) https://doi.org/10.1117/12.880509

KEYWORDS: Sensors, Silicon, Neurons, Artificial neural networks, Data modeling, Evolutionary algorithms, Sensor networks, Structural health monitoring, Neural networks, Algorithm development

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Proceedings Article | 27 April 2010 Paper

Label-free detection of biomolecules using a tapered optical fiber sensor

Ye Tian, Wenhui Wang, Armand Chery, Nan Wu, Charles Guthy, Xingwei Wang

Proceedings Volume 7673, 767307 (2010) https://doi.org/10.1117/12.852215

KEYWORDS: Sensors, Refractive index, Biosensors, Tapered optical fibers, Structured optical fibers, Cladding, Optical fibers, Single mode fibers, 3D modeling, Fiber optics sensors

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Proceedings Article | 20 April 2010 Paper

Simulation of a novel ultrasound generator-receiver on a single optical fiber

Xingwei Wang, Chunyang Liu, Nan Wu, Wenhui Wang, Charles Guthy, Ye Tian, Chengyu Cao

Proceedings Volume 7677, 76770Y (2010) https://doi.org/10.1117/12.852590

KEYWORDS: Ultrasonography, Nanoparticles, Optical fibers, Gold, Receivers, Finite element methods, Pulsed laser operation, Optical simulations, Interfaces, Single mode fibers

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Proceedings Article | 20 April 2010 Paper

Theoretical analysis of a novel ultrasound generator on an optical fiber tip

Nan Wu, Wenhui Wang, Ye Tian, Charles Guthy, Xingwei Wang

Proceedings Volume 7677, 76770X (2010) https://doi.org/10.1117/12.852210

KEYWORDS: Absorption, Ultrasonography, Gold, Optical fibers, Nanoparticles, Pulsed laser operation, Mie scattering, Photoacoustic spectroscopy, Acoustics, Transform theory

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Proceedings Article | 20 April 2010 Paper

Dynamic test of an acoustic/pressure sensor with precise cavity length control

Wenhui Wang, Nan Wu, Ye Tian, Charles Guthy, Xingwei Wang, Christopher Niezrecki

Proceedings Volume 7677, 76770W (2010) https://doi.org/10.1117/12.852614

KEYWORDS: Sensors, Fiber optics sensors, Silicon, Optical sensors, Laser sources, Interferometers, Microelectromechanical systems, Sensor performance, Sensor calibration, Calibration

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Showing 5 of 20 publications

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