Dr. Ye Feng
Technical Director at Lam Research
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper
Ye Feng, Joseph Ervin, Yang Lu, Anthony Woo, Martyn Coogans, Ivan Chakarov, David Fried
Proceedings Volume 11614, 116140I (2021) https://doi.org/10.1117/12.2582789
KEYWORDS: Process modeling, Calibration, Gallium arsenide, Instrument modeling, 3D modeling, Fin field effect transistors, Transmission electron microscopy, Silicon, Scatterometry, Manufacturing

Proceedings Article | 24 May 2004 Paper
Ye Feng, Xiaodong Zhang, Beverly Cheung, Zhuan Liu, Mita Isao, Manabu Hayashi
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536582
KEYWORDS: Semiconducting wafers, Silicon, Critical dimension metrology, Photoresist materials, Finite element methods, Dysprosium, Process control, Etching, Semiconductors, Wafer-level optics

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