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Yasushi Miki
at Mitsubishi Gas Chemical Co Inc
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Publications (1)
Proceedings Article | 25 March 2019 Paper
Development of new maleimides applied to spin-on carbon hardmask with characteristics of high heat resistance and good planarization
Junya Horiuchi, Takashi Makinoshima, Takashi Sato, Yasushi Miki, Masatoshi Echigo, Masayoshi Ueno, Koichi Yamada
Proceedings Volume 10960, 1096024 (2019) https://doi.org/10.1117/12.2514909
KEYWORDS: Resistance, System on a chip, Carbon, Polymers, Chemical analysis, Chromatography, Semiconducting wafers, Lithography, Etching, Coating
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