The surface plasmon has the advantages of breaking through optical diffraction limitation and local field enhancement. With the development of micro nanometer cycle structure of film/semiconductor rapidly, the cycle unit size tends to be nanometer level, therefore the requirement for purity and clarity is higher and higher. The existence of defect influence the quality of surface plasmon obviously , so it should not be ignored on the overall performance of optical system. In order to detect effectively the deficiency of surface plasmon, a surface plasmon structure model based on the plane type surface of periodic square hole which contains defective particles is proposed by Multi- Resolution Time-Domain (MRTD) method. The changes of the light scattering field when different defects appear in the structure of periodic square hole vitro exciter are focused on micro-and nanoscale, and we can analyze the influence of different structural parameters and defect parameters on the total scattering field to achieve effective control of the defects and modulation of the light field.
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