Mr. Yadhukrishnan SV Profile

Yadhukrishnan SV

at Indian institute of science

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Publications (1)

Proceedings Article | 21 August 2024 Poster + Paper

Advancements in space-based NUV spectrography: precision fabrication and evaluation of an optical slit using optical lithography and deep reactive ion etching

Binukumar Nair, Bharat Chandra P., Margarita Safonova, Sabiha Sultana, Yadhukrishnan S. V., Nawaz N., Shubham Ghatul, Shubhangi Jain, Mahesh Babu, Rekhesh Mohan, Jayant Murthy

Proceedings Volume 13093, 130932Z (2024) https://doi.org/10.1117/12.3018622

KEYWORDS: Fabrication, Deep reactive ion etching, Silicon, Spectrographs, Optical lithography, Wafer level optics, Spectral resolution, Optical alignment, Design, Semiconducting wafers

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