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Yihao (Howard) Huang
at Powerchip Semiconductor Manufacturing Corp
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Publications (1)
Proceedings Article | 26 May 2022 Poster + Presentation + Paper
Effective OPC model calibration using machine learning
Yi-Hao Huang, Shin-Shing Yeh, Yung-Ching Mai, Chia-Chi Lin, Jun-Cheng Lai
Proceedings Volume 12052, 120521C (2022) https://doi.org/10.1117/12.2611337
KEYWORDS: Data modeling, Calibration, Optical proximity correction, Machine learning, Statistical modeling, Process modeling, Lithography, Principal component analysis, Optics manufacturing, Semiconductors
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