Dr. Xin Ju Profile

Dr. Xin Ju

at Natl Ins for Materials Science

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 28 August 2003 Paper

Xin Ju, Mitsunori Kurahashi, Taku Suzuki, Yasushi Yamauchi

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.507555

KEYWORDS: Photomasks, Chemical species, Gold, Lithography, Copper, Self-assembled monolayers, Transmission electron microscopy, Mica, Helium, Etching

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Keywords/Phrases