Dr. Xiaolei Li
Senior Director at PDF Solutions Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 29 June 1998 Paper
Mariusz Niewczas, Xiaolei Li, Andrzej Strojwas, Wojciech Maly
Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310811
KEYWORDS: Photomasks, Databases, Lithography, Distance measurement, 3D modeling, Optical proximity correction, Photoresist materials, Transistors, Manufacturing, Deep ultraviolet

Proceedings Article | 29 June 1998 Paper
Xiaolei Li, Kevin Lucas, Aaron Swecker, Andrzej Strojwas
Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310805
KEYWORDS: 3D modeling, Photoresist materials, Fused deposition modeling, Metals, Photoresist developing, Reflectivity, Lithography, Photomasks, Waveguides, Computer simulations

Proceedings Article | 11 September 1997 Paper
Xiaolei Li, Andrzej Strojwas, Aaron Swecker, Mahesh Reddy, Linda Milor, YungTao Lin
Proceedings Volume 3216, (1997) https://doi.org/10.1117/12.284699
KEYWORDS: Particles, Photoresist materials, Aluminum, Etching, Tungsten, Contamination, Photoresist developing, Manufacturing, 3D modeling, Semiconducting wafers

Proceedings Article | 7 July 1997 Paper
Xiaolei Li, Mahesh Reddy, Andrzej Strojwas, Linda Milor, YungTao Lin
Proceedings Volume 3050, (1997) https://doi.org/10.1117/12.275924
KEYWORDS: Particles, Aluminum, Contamination, Photoresist materials, Etching, Tungsten, Photoresist developing, Scanning electron microscopy, Inspection, Very large scale integration

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