CONFERENCE PROCEEDINGS
Advanced Search
Xiangyu Zhu
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 23 December 2023 Paper
Influence of absorption distribution in Mo/Si multilayers on 13.5 nm femtosecond laser damage morphologies
Proceedings Volume 12982, 129820U (2023) https://doi.org/10.1117/12.3018263
KEYWORDS: Multilayers, Monte Carlo methods, Extreme ultraviolet, Absorption, Light absorption, Film thickness, Silicon, Femtosecond phenomena, Laser induced damage, Reflection
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top