Dr. William W. Chism Profile

Dr. William W. Chism

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 24 August 2009 Paper

Photo-reflectance characterization of USJ activation in millisecond annealing

Will Chism, Michael Current, Victor Vartanian

Proceedings Volume 7405, 74050T (2009) https://doi.org/10.1117/12.830900

KEYWORDS: Modulation, Semiconductors, Reflectivity, Silicon, Diffusion, Laser beam diagnostics, Annealing, Semiconducting wafers, Temperature metrology, Boron

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years