Light-emitting diodes based on InGaN/GaN quantum wells are widely used for lighting and display applications. However, such LEDs are monochromatic with relatively narrow spectral line-widths and without color-tuning capabilities. In order to use them for lighting, additional color-conversion material, typically phosphor, is needed. For display applications, multiple chips are required for color-tuning. The highly-strained nature of the InGaN/GaN wells due to lattice and thermal mismatch, especially for those of longer emission wavelengths, offer a viable way of wavelength tuning. Through dimensional downsizing of the emitters, the emission wavelengths can be blue-shifted via the strain-relaxation effect. Such wavelength tuning techniques can be exploited for the development of monolithic broadband LEDs for lighting, as well as RGB pixelated arrays for display applications, potentially offering improvements to performances, as well as manufacturing costs and yields.
While quantum heterostructures are typically achieved via growth, here in this paper we would like to demonstrate InGaN quantum nanodisks in nanopillars fabricated by dry etching of InGaN/GaN MQWs. The fabricated quantum nanodisks of sub-30 nm dimension are investigated using micro-photoluminescence measurements and time-resolved photoluminescence studies. Changes in quantum confinement have been successfully demonstrated by microphotoluminescence studies with a reduction of the PL bandwidth of over 54% after fabrication of the quantum nanodisks. The quantum confinement effect of the nanodisk is further verified using TRPL measurement, which demonstrated a reduction of over 80% of TRPL lifetime. The reduction in lifetime implies an increase in radiative recombination rate and thus better quantum efficiencies.
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