Dr. W. Jarrett Campbell Profile

Dr. W. Jarrett Campbell

Sr. Applications Engineer at Schneider Electric

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 12 July 2002 Paper

Just-in-time adaptive disturbance estimation for run-to-run control of photolithography overlay

Stacy Firth, W. Campbell, Thomas Edgar

Proceedings Volume 4692, (2002) https://doi.org/10.1117/12.475651

KEYWORDS: Reticles, Optical lithography, Manufacturing, Overlay metrology, Control systems, Process modeling, Error analysis, Semiconductors, Computer simulations, Algorithm development

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Proceedings Article | 3 September 1999 Paper

Integration of the APC framework with AMD's Fab25 factory system

Scott Bushman, William Campbell, Michael Miller

Proceedings Volume 3882, (1999) https://doi.org/10.1117/12.361323

KEYWORDS: Process control, Telecommunications, Metrology, Manufacturing, Semiconductors, Interfaces, Control systems, Data storage, MATLAB, Data modeling

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Proceedings Article | 3 September 1998 Paper

Multivariate run-to-run control of arm-to-arm variations in chemical mechanical planarization

W. Campbell, Chris Raeder, Valerie Wenner, Thomas Edgar

Proceedings Volume 3507, (1998) https://doi.org/10.1117/12.324360

KEYWORDS: Chemical mechanical planarization, Process control, Semiconducting wafers, Model-based design, Software development, Polishing

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Proceedings Article | 25 August 1997 Paper

Evaluation of model predictive control in run-to-run processing in semiconductor manufacturing

James Mullins, W. Campbell, Allen Stock

Proceedings Volume 3213, (1997) https://doi.org/10.1117/12.284636

KEYWORDS: Process modeling, Control systems, Semiconducting wafers, Chemical mechanical planarization, Data modeling, Device simulation, Polishing, Process control, Semiconductor manufacturing, Manufacturing

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Conference Committee Involvement (3)

Data Analysis and Modeling for Process Control II

3 March 2005 | San Jose, California, United States

Data Analysis and Modeling for Process Control

26 February 2004 | Santa Clara, California, United States

Advanced Process Control and Automation

27 February 2003 | Santa Clara, CA, United States

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