Dr. Vladimir Kvon Profile

Dr. Vladimir Kvon

at ASML Netherlands BV

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Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper

Particle mobilization by EUV-induced plasma and fast electrons

Mark van de Kerkhof, Dmitry Shefer, Andrey Nikipelov, Fabio Sbrizzai, Vladimir Kvon, Sim Bouwmans, Job Beckers, Vadim Banine

Proceedings Volume 12953, 129530E (2024) https://doi.org/10.1117/12.3009896

KEYWORDS: Particles, Plasma, Electrons, Adhesion, Scanners, Hydrogen, Extreme ultraviolet lithography, Ions, Stochastic processes, Particle contamination

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SPIE Journal Paper | 19 February 2021 Open Access

Plasma-assisted discharges and charging in EUV-induced plasma

Mark van de Kerkhof, Andrei Yakunin, Vladimir Kvon, Selwyn Cats, Luuk Heijmans, Manis Chaudhuri, Dmitry Asthakov

JM3, Vol. 20, Issue 01, 013801, (February 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.1.013801

KEYWORDS: Reticles, Plasma, Particles, Electrons, Extreme ultraviolet, Ions, Scanners, Extreme ultraviolet lithography, Protactinium, Electrodes

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Proceedings Article | 23 March 2020 Paper

Understanding EUV-induced plasma and application to particle contamination control in EUV scanners

Mark van de Kerkhof, Andrei Yakunin, Vladimir Kvon, Ferdi van de Wetering, Selwyn Cats, Luuk Heijmans, Andrey Nikipelov, Adam Lassise, Vadim Banine

Proceedings Volume 11323, 113230Y (2020) https://doi.org/10.1117/12.2551020

KEYWORDS: Plasma, Particles, Ions, Extreme ultraviolet, Scanners, Hydrogen, Reticles, Particle contamination

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