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Victor V. Mamaev
at Semiteq JSC
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Publications (1)
Proceedings Article | 30 December 2016 Paper
III-Nitride advanced technologies and equipment for microelectronics
S. Petrov, A. Alexeev, V. Mamaev, D. Krasovitsky, V. Chaly
Proceedings Volume 10224, 102241T (2016) https://doi.org/10.1117/12.2267146
KEYWORDS: Heterojunctions, Plasma etching, Gallium nitride, Aluminum, Aluminum nitride, Metalorganic chemical vapor deposition, Transistors, Resistance, Silicon carbide, Gallium
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