Mr. Toshihiro Kobayashi Profile

Toshihiro Kobayashi

at Gigaphoton Inc.

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Publications (1)

Proceedings Article | 10 April 2024 Poster

Analyzing line width roughness (LWR) sensitivity to resist and laser-induced speckle for enhanced PSD-based quantification

Takamitsu Komaki, Tomohiro Iwaki, Yuichi Mukai, Kouichi Fujii, Toshihiro Kobayashi, Toshihiro Ohga, Kouji Kakizaki, Takashi Saito, Risa Yasue, Natsuki Okada, Katsunori Otsuki, Tomonori Okada, Kanji Sugino, Takahito Kumazaki

Proceedings Volume PC12953, PC129530S (2024) https://doi.org/10.1117/12.3008944

KEYWORDS: Speckle, Line width roughness, Semiconductors, Scanners, Lithography, Light sources, Chromatic aberrations

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