Mr. Tomofumi Suzuki Profile

Tomofumi Suzuki

at Hamamatsu Photonics KK

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Publications (2)

Proceedings Article | 4 March 2019 Presentation + Paper

Compact FTIR engine made through MOEMS technology

Tomofumi Suzuki, Tatsuya Sugimoto, Kyosuke Kotani, Yutaka Kuramoto, Katsumi Shibayama

Proceedings Volume 10931, 109310X (2019) https://doi.org/10.1117/12.2508985

KEYWORDS: Mirrors, FT-IR spectroscopy, Microelectromechanical systems, Interferometers, Beam splitters, Signal to noise ratio, Silicon, Optical alignment, Signal detection

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Proceedings Article | 7 March 2014 Paper

MEMS based miniature FT-IR engine with built-in photodetector

Yoshihisa Warashina, Tomofumi Suzuki, Kohei Kasamori, Ryosuke Okumura, Yuki Matsuo, Mitsutaka Takemura

Proceedings Volume 8977, 89770E (2014) https://doi.org/10.1117/12.2038588

KEYWORDS: Mirrors, Photodetectors, Deep reactive ion etching, Silicon, Microelectromechanical systems, Beam splitters, FT-IR spectroscopy, Actuators, Etching, Photomasks

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