Dr. Tom Watson Profile

Dr. Tom Watson

Senior Principal Manufacturing Engineer at DRS Daylight Solutions

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Publications (5)

Proceedings Article | 21 August 2020 Open Access

DRS Daylight Solutions’ STEM Outreach Committee

Tom Watson, Shelley Tracy

Proceedings Volume 11480, 114800P (2020) https://doi.org/10.1117/12.2567802

KEYWORDS: Photonics, Scanning transmission electron microscopy, Mathematics, Outreach programs, Internships, Chemical elements

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Proceedings Article | 14 September 2001 Paper

Next-generation 193-nm laser for sub-100-nm lithography

Thomas Duffey, Gerry Blumenstock, Vladimir Fleurov, Xiaojiang Pan, Peter Newman, Holger Glatzel, Tom Watson, J. Erxmeyer, Ralf Kuschnereit, Bernhard Weigl

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435654

KEYWORDS: Lithography, Laser development, Laser applications, Optical lithography, Semiconducting wafers, Electrodes, Excimer lasers, Optical coatings, Light emitting diodes, Semiconductors

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Proceedings Article | 26 July 1999 Paper

Production-ready 2-kHz KrF excimer laser for DUV lithography

Dave Myers, Tom Watson, Palash Das, Gunasiri Padmabandu, Paolo Zambon, Thomas Hofmann, William Partlo, Christopher Hysham, Richard Dunning

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354309

KEYWORDS: Lithography, Excimer lasers, Control systems, Reliability, Laser stabilization, Safety, Laser systems engineering, Deep ultraviolet, Manufacturing, Semiconductor lasers

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Proceedings Article | 29 June 1998 Paper

ArF lasers for production of semiconductor devices with CD<0.15 um

Thomas Duffey, Todd Embree, Toshihiko Ishihara, Richard Morton, William Partlo, Tom Watson, Richard Sandstrom

Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310731

KEYWORDS: Lithography, Laser applications, Pulsed laser operation, Semiconductors, Excimer lasers, Laser stabilization, Optical damage, Semiconductor lasers, Diffraction gratings, Pulsed power

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Proceedings Article | 31 March 1997 Paper

Performance characteristics of a high-energy, high-pulse repetition frequency krypton fluoride laser

Tom Watson, Richard Ujazdowski, Palash Das

Proceedings Volume 2992, (1997) https://doi.org/10.1117/12.270095

KEYWORDS: Resonators, Pulsed power, Excimer lasers, Pulsed laser operation, Laser applications, Solid state lasers, Manufacturing, Solid state physics, Laser resonators, Fluorine

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