Sand erosion durability of amorphous hydrogenated(a-SiC:H) and non-hydrogenated (a-SiC) Silicon-carbon thin films deposited by direct current(DC) magnetron sputtering on the crystal Silicon have been investigated in this paper. A well calculated simulations indicate that thin film perform processing outstanding sand erosion durability with higher hardness, resulting a promoted processing in the deposition of SiC. The deposition conditions such as gas pressure, sputtering power and substrate bias that all affects the properties of the thin film ultimately, which was tested by Fourier Transform Infrared Spectroscopy(FTIR), Universal Mechanical Tester(UMT) and White Light Interferometer(WLI). The sand erosion test reveals a-SiC thin film has an advantage of mechanical property compared to a SiC:H and DLC coating according to the least impact cracks on its surface, demonstrating the previous calculated simulations strongly.
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