CONFERENCE PROCEEDINGS
Advanced Search
Theo M. Modderman
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 27 June 2019 Paper
ASML NXE pellicle update
Derk Brouns, Par Broman, Jan-Willem van der Horst, Raymond Lafarre, Raymond Maas, Theo Modderman, Roel Notermans, Guido Salmaso
Proceedings Volume 11178, 1117806 (2019) https://doi.org/10.1117/12.2536344
KEYWORDS: Pellicles, Extreme ultraviolet, Semiconducting wafers, Reflectivity, Extreme ultraviolet lithography, Reticles, Particles, Reflection, Scanners, Photomasks
Proceedings Article | 15 March 2006 Paper
Immersion lithography with an ultrahigh-NA in-line catadioptric lens and a high-transmission flexible polarization illumination system
Proceedings Volume 6154, 61541W (2006) https://doi.org/10.1117/12.657558
KEYWORDS: Polarization, Combined lens-mirror systems, Semiconducting wafers, Curtains, Lens design, Lithographic illumination, Fiber optic illuminators, Lithography, Mirrors, Imaging systems
Proceedings Article | 28 May 2004 Paper
Optical lithography with 157-nm technology
Theo Modderman, Hans Jasper, Herman Boom, Tammo Uitterdijk, Stephane Dana, Harry Sewell, Timothy O'Neil, Jan Mulkens, Martin Brunotte, Birgit Mecking, Toralf Gruner
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.535101
KEYWORDS: Reticles, Pellicles, Lithography, Chemical elements, Oxygen, Contamination, Optical lithography, Scanners, Distortion, Surface finishing
Proceedings Article | 14 September 2001 Paper
Performance results of a new generation of 300-mm lithography systems
Boudewijn Sluijk, Tom Castenmiller, Richard du Croo de Jongh, Hans Jasper, Theo Modderman, Leon Levasier, Erik Loopstra, Guustaaf Savenije, Marc Boonman, Harry Cox
Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435752
KEYWORDS: Semiconducting wafers, Optical alignment, Lithography, Sensors, Imaging systems, Metrology, Reticles, Optical lithography, Overlay metrology, Optical scanning systems
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top