CONFERENCE PROCEEDINGS
Advanced Search
Takaya Higa
at Tokyo Intitute Of Technology
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 7 October 2014 Paper
Properties of Si/SiO2 superlattice nanodisc array prepared by nanosphere lithography
Takaya Higa, Ryousuke Ishikawa, Shinsuke Miyajima, Makoto Konagai
Proceedings Volume 9178, 91780P (2014) https://doi.org/10.1117/12.2061472
KEYWORDS: Superlattices, Silicon, Annealing, Nanostructures, Crystals, Etching, Solar cells, Reactive ion etching, Lithography, Nanowires
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top