Dr. Sylvain I. Misat Profile

Dr. Sylvain I. Misat

Manager Photolithography Applications at Kulicke & Soffa Netherlands B.V.

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Publications (2)

Proceedings Article | 25 March 2003 Paper

Lithographic performance of an ASML i-line step-and-repeat system by using photosensitive Durimides

Rudy Pellens, Angelique van Klaveren, Rutger Voets, Jean-Paul van den Heuvel, Sylvain Misat, Pamela Waterson, Laurie Peterson

Proceedings Volume 4945, (2003) https://doi.org/10.1117/12.471974

KEYWORDS: Microelectromechanical systems, Lithography, Semiconducting wafers, Manufacturing, Packaging, Calibration, Photoresist materials, Micromachining, Critical dimension metrology, Silicon

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Proceedings Article | 15 January 2003 Paper

Process conditions and lithographic performance arch durimide polyimides in the ultra-thick film regime

Sylvain Misat, Rudy Pellens, Rutger Voets, Angelique van Klaveren, Jean-Paul van den Heuvel, L. Peterson, Pamela Waterson, D. Racicot, D. Roza

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478241

KEYWORDS: Semiconducting wafers, Lithography, Microelectromechanical systems, Packaging, Coating, Polymers, Critical dimension metrology, Resistance, Thin film coatings, Micromachining

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