Mr. Sven Boese Profile

Sven Boese

at Qoniac GmbH

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Publications (3)

Proceedings Article | 28 April 2023 Poster + Paper

Focus spot monitoring: design of an automatable detection, classification, and impact analysis pipeline

Syed Naime Mohammad, Sven Boese, Philip Groeger, Holger Bald, Alberto Lopez-Gomez, Clemens Utzny, Stefan Buhl

Proceedings Volume 12494, 1249416 (2023) https://doi.org/10.1117/12.2657970

KEYWORDS: Semiconducting wafers, Lithography, Zernike polynomials, Particles, Optical lithography, Semiconductor manufacturing, Modeling, Design and modelling, Scanners, Yield improvement

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Proceedings Article | 27 April 2023 Presentation + Paper

Quantifying CD-SEM contact hole roughness and shape combined with machine learning-based pattern fidelity scores for process optimization and monitoring

Hyosung Lee, Seonho Lee, Hyungju Rah, Iksun Park, Jaeil Lee, Jaewoong Sohn, Yongchan Kim, Christoph Ehrlich, Philip Groeger, Sven Boese, Enrico Bellmann, Stefan Buhl, Seop Kim, Kang-san Lee

Proceedings Volume 12496, 124961P (2023) https://doi.org/10.1117/12.2657679

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Scanning electron microscopy, Image processing, Image restoration, Education and training, Contour extraction, Machine learning, Deformation, Finite element methods

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Proceedings Article | 26 May 2022 Poster + Paper

Machine learning modeling using process context and exposure data for overlay prediction

W. H. Wang, Irina Brinster, Mohsen Maniat, Fatima Anis, Yen-Hui Lee, Sven Boese, C. F. Tseng, Wei-Yuan Chu, Boris Habets, C. H. Huang, Elvis Yang, T. H. Yang, K. C. Chen

Proceedings Volume 12053, 120531Q (2022) https://doi.org/10.1117/12.2613202

KEYWORDS: Semiconducting wafers, Overlay metrology, Data modeling, Metrology, Optical parametric oscillators, Performance modeling, Process modeling, Machine learning, Semiconductor manufacturing, Data processing

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