Susanne M. Pepper
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 March 2009 Paper
Ron Jee, Susanne Pepper, David Stedman
Proceedings Volume 7272, 727223 (2009) https://doi.org/10.1117/12.814291
KEYWORDS: Photoresist materials, Sensors, Lithography, Deep ultraviolet, Liquids, Refraction, Refractive index, Semiconducting wafers, Temperature metrology, Computer simulations

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