This paper presents a semirigid (SR) bonnet tool which has the advantages of high efficiency and determinacy for material removal on optical elements and also has the potential to be used on aspheric optics. It consists of three layers: a metal sheet, a rubber membrane, and a polishing pad, from inside to outside. It inherits the flexibility of a normal bonnet but has a higher stiffness. Finite element analysis was performed to determine that the stainless steel is the best-suited material for use as the metal sheet. An SR bonnet with a stainless-steel metal sheet was fabricated and tested. Its tool influence function (TIF) is Gaussian-like, and the TIF stability is more than 90%. The peak-to-valley of its uniform removal area is less than 0.1λ. Tool ripples are highly depressed and the surface profile is well preserved in the prepolishing test. In 12 min, ∼36 mm3 of material is removed.
The interference of grinding wheel and optic surface during grinding process causes numerous acoustic emission (AE)
phenomena. AE signals are competent for monitoring the quality of the ground surface. A quality prediction model of
grinding optics is established based on support vector machine (SVM). Some time domain characteristics of AE signals
are chosen as the input vectors. And surface roughness (Ra) and surface shape accuracy (P-V) are the output vectors,
respectively. The experiment results show that the model can accurately predict the surface quality of the optics during
grinding.
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