Dr. Steven Marks Profile

Dr. Steven Marks

Senior Staff Scientist

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Publications (2)

Proceedings Article | 21 November 2001 Paper

PZT stack etch for MEMS devices in a capacitively coupled high-density plasma reactor

Paul Werbaneth, John Almerico, Leslie Jerde, Steve Marks

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448976

KEYWORDS: Etching, Plasma, Plasma etching, Platinum, Multiphoton fluorescence microscopy, Ferroelectric materials, Ions, Microelectromechanical systems, Photomasks, Electrodes

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Proceedings Article | 29 November 1993 Paper

Analysis of insertion device magnet measurements for the advanced light source

Steve Marks, David Humphries, Brian Kincaid, Ross Schlueter, Chunxi Wang

Proceedings Volume 2013, (1993) https://doi.org/10.1117/12.164798

KEYWORDS: Magnetism, Electron beams, Light sources, Particles, Measurement devices, Data analysis, Tolerancing, Optical filters, Extreme ultraviolet, Interferometers

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