Steven Cheung
Process Engineer at MicroAssembly Technologies Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 January 2006 Paper
Michael Cohn, Kevin Chang, Alexandros Papavasiliou, Scot Oliver, Gina Kim, Gabriel Matus, Zhixiong Xiao, Steven Cheung, KaoSio Saechao, Ryan Roehnelt
Proceedings Volume 6113, 61130M (2006) https://doi.org/10.1117/12.658058
KEYWORDS: Actuators, Mirrors, Microelectromechanical systems, Reflectors, Adaptive optics, Assembly equipment, Micromirrors, Deformable mirrors, Spatial light modulators, Semiconducting wafers

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