Dr. Stephen A. Coulombe
Senior Engineer
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 October 1998 Paper
Proceedings Volume 3426, (1998) https://doi.org/10.1117/12.328456
KEYWORDS: Scatterometry, Semiconducting wafers, Scanning electron microscopy, Metrology, Microelectronics, Diffraction, Flat panel displays, Scatter measurement, Critical dimension metrology, Diffraction gratings

Proceedings Article | 8 June 1998 Paper
Stephen Coulombe, Petre-Catalin Logofatu, Babar Minhas, S. Sohail Naqvi, John McNeil
Proceedings Volume 3332, (1998) https://doi.org/10.1117/12.308737
KEYWORDS: Photoresist materials, Phase measurement, Scatterometry, Diffraction gratings, Silicon, Diffraction, Received signal strength, Reflectivity, Metrology, Scatter measurement

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top