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Dr. Stéphane Robert
at Lab Hubert Curien
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Author
Publications (4)
SPIE Journal Paper | 26 May 2016
Automatic inspection of a residual resist layer by means of self-organizing map
Zaki S. Philippe, Stéphane Robert, Bernard Bayard
OE, Vol. 55, Issue 05, 054106, (May 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.5.054106
KEYWORDS: Photoresist materials, Neurons, Inspection, Etching, Scatterometry, Photomasks, Optical lithography, Manufacturing, Inverse optics, Optical engineering
Proceedings Article | 10 September 2007 Paper
Optimal architecture of a neural network for a high precision in ellipsometric scatterometry
Issam Gereige, Stéphane Robert, Gérard Granet
Proceedings Volume 6648, 66480G (2007) https://doi.org/10.1117/12.734278
KEYWORDS: Neurons, Scatterometry, Neural networks, Diffraction gratings, Inverse optics, Inverse problems, Mathematical modeling, Ellipsometry, Semiconductors, Diffraction
SPIE Journal Paper | 1 March 2005
Control of the homogeneity of an optical grating by a neural characterization
Stéphane Robert, Alain Mure-Ravaud
OE, Vol. 44, Issue 03, 033601, (March 2005) https://doi.org/10.1117/12.10.1117/1.1873332
KEYWORDS: Neurons, Silicon, Optical engineering, Diffraction gratings, Optical testing, Inverse optics, Nondestructive evaluation, Reactive ion etching, Time metrology, Scatterometry
Proceedings Article | 26 February 2004 Paper
Resolution of the inverse problem of optical grating testing by means of a neural network
Stephane Robert, Alain Mure-Ravaud
Proceedings Volume 5252, (2004) https://doi.org/10.1117/12.514126
KEYWORDS: Neurons, Inverse optics, Scanning electron microscopy, Inverse problems, Diffraction gratings, Neural networks, Silicon, Optical testing, Geometrical optics, Image quality
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