Dr. Stefan Egger
at National Institute for Materials Science
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 8 September 2006 Paper
Proceedings Volume 6340, 63400Z (2006) https://doi.org/10.1117/12.681375
KEYWORDS: Photomasks, Electrodes, Fabrication, Scanning probe microscopy, Metals, Atomic force microscopy, Modulation, Contamination, Dielectrics, Nanolithography

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top