Dr. Sookap Hahn Profile

Dr. Sookap Hahn

President at SKW Associates Inc

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Publications (2)

Proceedings Article | 1 February 1992 Paper

Damage and RTA kinetics in Ar+ and Si+ ion-implanted CZ silicon characterized by thermal wave modulated optical reflectance

Sookap Hahn, Walter Smith, Tohru Hara, H. Hagiwara, H. Suzuki, Yeong-Keun Kwon, Kwang-Il Kim, Y.-H. Bae, W. Chung, Charles Yarling, L. Larson, Richard Meinecke

Proceedings Volume 1595, (1992) https://doi.org/10.1117/12.56670

KEYWORDS: Ions, Silicon, Semiconducting wafers, Modulation, Reflectivity, Ion implantation, Annealing, Thermography, Transmission electron microscopy, Imaging systems

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Proceedings Article | 1 April 1991 Paper

Investigation of rapid thermal process-induced defects in ion-implanted Czochralski silicon

Charles Yarling, Sookap Hahn, David Hodul, Hisaaki Suga, Walter Smith

Proceedings Volume 1393, (1991) https://doi.org/10.1117/12.25704

KEYWORDS: Semiconducting wafers, X-rays, Silicon, Mirrors, Signal processing, Optical inspection, Inspection, Reflectivity, Crystals, Arsenic

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