Mr. Song Zhang Profile

Song Zhang

at Huazhong University of Science and Technology

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 December 2024 Paper

Chunxiao Mu, Song Zhang, David H. Wei, Hao Jiang, Shiyuan Liu

Proceedings Volume 13423, 1342315 (2024) https://doi.org/10.1117/12.3053047

KEYWORDS: Modeling, Optical proximity correction, Lithography, Calibration, Systems modeling, Photoresist processing

Proceedings Article | 7 March 2019 Paper

Song Zhang, Jiamin Liu, Hao Jiang, Shiyuan Liu

Proceedings Volume 11053, 110531M (2019) https://doi.org/10.1117/12.2511510

KEYWORDS: Beam splitters, Polarization, Distortion, Mueller matrices, Ellipsometry

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Keywords/Phrases