Mr. Shigeru Eto Profile

Shigeru Eto

at Nikon Corp

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Publications (2)

Proceedings Article | 23 March 2020 Presentation + Paper

Novel overlay correction using inline alignment station (iAS) for scanner

Takahisa Kikuchi, Ayako Sugimoto, Shigeru Eto, Akira Okutomi, Naoki Morita

Proceedings Volume 11327, 113270W (2020) https://doi.org/10.1117/12.2551973

KEYWORDS: Semiconducting wafers, Optical alignment, Scanners, Machine learning, Overlay metrology, Bessel functions, Metrology, Integration

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Proceedings Article | 20 March 2019 Paper

Automatic parameter setting for lens aberration control during product lot exposure

Yutaka Kanakutsu, Yukio Koizumi, Hironori Ikezawa, Shigeru Eto, Junji Ikeda, Takenori Takeuchi, Tomoyuki Matsuyama, Edward Stan, Ronald Hiltunen

Proceedings Volume 10961, 109610M (2019) https://doi.org/10.1117/12.2514917

KEYWORDS: Calibration, Reticles, Actuators, Control systems, Wavefronts, Scanners, Distortion, Automatic control, Feedback control, Deformable mirrors

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