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Dr. Shigenobu Yamanaka
Manager/R&D at Daiken Chemical Co Ltd
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Publications (1)
Proceedings Article | 10 May 2005 Paper
Carbon nanotube atomic force microscopy probes
Shigenobu Yamanaka, Takashi Okawa, Seiji Akita, Yoshikazu Nakayama
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.621263
KEYWORDS: Silicon, Carbon nanotubes, Scanning electron microscopy, Atomic force microscopy, Silicon carbide, Carbon, Scanning probe microscopy, Process control, Semiconductors, Atomic force microscope
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