Dr. Shigeki Saito Profile

Dr. Shigeki Saito

Research Fellow at Tokyo Institute of Technology

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Publications (2)

Proceedings Article | 8 October 2001 Paper

Dynamics of micro-object operation considering the adhesive effect under an SEM

Shigeki Saito, Hideki Miyazaki, Tomomasa Sato, Kunio Takahashi, Tadao Onzawa

Proceedings Volume 4568, (2001) https://doi.org/10.1117/12.444134

KEYWORDS: Adhesives, Chromium, Scanning electron microscopy, Optical spheres, Silica, Interfaces, Gold, Electron microscopes, Analytical research, Data acquisition

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Proceedings Article | 5 October 1998 Paper

Micro-object handling under SEM by vision-based automatic control

Takeshi Kasaya, Hideki Miyazaki, Shigeki Saito, Tomomasa Sato

Proceedings Volume 3519, (1998) https://doi.org/10.1117/12.325738

KEYWORDS: Scanning electron microscopy, Optical spheres, Image processing, Visualization, Optical microscopes, Hough transforms, Computing systems, Reliability, Automatic control, Sensors

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